MOOC: Micro and Nanofabrication (MEMS) - Fall

Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.
Micro and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.
In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment.

• Select appropriately the correct fabrication process for a specific micro-device or microsystem
• Establish the workflow for the cleanroom processes
• Identify how physical and chemical phenomena govern miniaturized systems for various applications
• Manage resource planning for a given microsystem fabrication

https://forms.cloud.microsoft/e/D69sPLvzHU

Oral exam using VOIP. The exam will take place in February 2026, and the exam date will be made available in November 2026.

Open to PhD and Master students with priority given to PhD students.

4 places are available for EuroTeQ students. Students will be notified if they are accepted on the course shortly after the application deadline.

Learning prerequisites: Basics of physics and chemistry.

• "Fundamentals of Microfabrication and Nanotechnology, Volume II, Manufacturing Techniques for Microfabrication and Nanotechnology", Marc J. Madou, CRC Press
• "Introduction to Microfabrication, Second Edition", Sami Franssila, Wiley