MOOC: Micro and Nanofabrication (MEMS) - Fall

Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.
Micro and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.
In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment.

• Select appropriately the correct fabrication process for a specific micro-device or microsystem
• Establish the workflow for the cleanroom processes
• Identify how physical and chemical phenomena govern miniaturized systems for various applications
• Manage resource planning for a given microsystem fabrication

Contact coordinator via email

Oral exam using VOIP. Exam dates: 4 and 11 December.

Basics of physics and chemistry

• "Fundamentals of Microfabrication and Nanotechnology, Volume II, Manufacturing Techniques for Microfabrication and Nanotechnology", Marc J. Madou, CRC Press
• "Introduction to Microfabrication, Second Edition", Sami Franssila, Wiley