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Micro and Nanofabrication

MICRO-621
Manufacturing and Processing

About this course

Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.
Micro and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.
In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it is done through video sequences and zooming into the equipment.

Learning outcomes

  • Select appropriately the correct fabrication process for a specific micro-device or microsystem
  • Establish the workflow for the cleanroom processes
  • Identify how physical and chemical phenomena govern miniaturized systems for various applications
  • Manage resource planning for a given microsystem fabrication

Enrolment details

Contact coordinator via email

Examination

Oral exam using VOIP

Course requirements

Basics of physics and chemistry

Resources

  • "Fundamentals of Microfabrication and Nanotechnology, Volume II, Manufacturing Techniques for Microfabrication and Nanotechnology", Marc J. Madou, CRC Press
  • "Introduction to Microfabrication, Second Edition", Sami Franssila, Wiley

Additional information

  • Credits
    ECTS 1
  • Level
    Doctoral
  • Contact hours per week
    1
  • Instructors
    Brugger Jürgen
  • Mode of instruction
    Online - time-independent
If anything remains unclear, please check the FAQ of EPFL (Switzerland).
There are currently no offerings available for students of TUM (Germany)