About this course
Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.
Micro and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.
In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it is done through video sequences and zooming into the equipment.
Learning outcomes
- Select appropriately the correct fabrication process for a specific micro-device or microsystem
- Establish the workflow for the cleanroom processes
- Identify how physical and chemical phenomena govern miniaturized systems for various applications
- Manage resource planning for a given microsystem fabrication
Enrolment details
Contact coordinator via email
Examination
Oral exam using VOIP
Course requirements
Basics of physics and chemistry
Resources
- "Fundamentals of Microfabrication and Nanotechnology, Volume II, Manufacturing Techniques for Microfabrication and Nanotechnology", Marc J. Madou, CRC Press
- "Introduction to Microfabrication, Second Edition", Sami Franssila, Wiley
Additional information
- More infoCoursepage on website of École Polytechnique Fédérale de Lausanne
- Contact a coordinator
- CreditsECTS 1
- LevelDoctoral
- Contact hours per week1
- InstructorsBrugger Jürgen
- Mode of instructionOnline - time-independent